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真空熔炼炉
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实验室配备一台真空熔炼炉,担任高纯金属及合金新材料靶材的开发任务。设备采用三级真空泵组,配有机械泵、罗茨泵及分子泵,真空度可达5X10-4Pa。熔炼浇铸系统采用IGBT电源和感应线圈组成的感应加热设备进行加热。熔炼温度可达2000oC以上,并且能在2000oC的熔炼温度下连续工作100小时。在加热过程中,熔炼坩埚内的温度均匀性可达到±5oC.
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