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电阻仪

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磁控溅射镀膜对溅射靶材的电阻率有着极高的要求。电阻率为靶材产品质量控制的重要参数之一。实验室配有一台四探针。根据不同材料特性需要,实验室配有多种探头。高耐磨碳化钨探针探头,以测试硅类半导体、金属、导电塑料类等硬质材料的电阻率/方阻;球形镀金铜合金探针探头,可测柔性材料导电薄膜、金属涂层或薄膜、陶瓷或玻璃等基底上导电膜(ITO膜)或纳米涂层等半导体材料的电阻率/方阻。

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